文章摘要
杨洋,王罡,俞建超,周婷婷,李遥,帅茂兵.无氧铜超精加工表面微观形貌的分形维数表征[J].材料导报,2017,31(3):52-56
无氧铜超精加工表面微观形貌的分形维数表征
Fractal Dimension Characterization on Surface Microtopography of Ultra-precision Machined Oxygen-free Copper
  
DOI:10.11896/j.issn.1005-023X.2017.03.009
中文关键词: 分形维数 晶界浮凸 尺码法 带阻滤波 单点金刚石切削
英文关键词: fractal dimension, grain boundary step, yard stick method, band-stop filtering, single point diamond turning
基金项目:北京市自然科学基金面上项目(3152013);清华大学摩擦学国家重点实验室自主科研重点项目(SKLT2013A01)
作者单位
杨洋 表面物理与化学重点实验室,江油 621908
清华大学精密超精密制造装备及控制北京市重点实验室,北京 100084 
王罡 清华大学精密超精密制造装备及控制北京市重点实验室,北京 100084 
俞建超 清华大学精密超精密制造装备及控制北京市重点实验室,北京 100084 
周婷婷 表面物理与化学重点实验室,江油 621908
清华大学精密超精密制造装备及控制北京市重点实验室,北京 100084 
李遥 表面物理与化学重点实验室,江油 621908 
帅茂兵 表面物理与化学重点实验室,江油 621908 
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中文摘要:
      单点金刚石超精密加工能够获得纳米级的低粗糙度表面。进一步的实验表明,采用该工艺进行退火态无氧铜切削,已加工表面在刀痕基础上还会出现清晰的晶界浮凸现象。传统的粗糙度概念无法有效表征与区分含有晶界浮凸信息的超精加工表面微观形貌。引入分形维数概念,采用该理论中尺码法对无氧铜超精加工表面的微观形貌进行分形维数计算;为降低切削刀痕信号干扰、突出晶界浮凸信息,设计表面信号带阻滤波方法。计算结果表明,超精加工后的表面分形维数包含了加工刀痕与晶界浮凸信息,由于两者尺度相近,传统的粗糙度测量无法区分其差异;采用带阻滤波与尺码法耦合方式,能够有效识别晶界浮凸特点,定量地反映微观尺度下超精加工表面的形貌特征信息。
英文摘要:
      Nano-scale surface of low roughness can be obtained in single point diamond ultra-precision machining. Further experiments show that clear embossed grain boundary will appear on the machined surface filled with tool marks when annealed oxygen-free copper cut by single point diamond ultra-precision machining. Ultra-precision machined surface′s microtopography with embossed grain boundary can not be effectively characterized and distinguished with traditional concept of roughness. In this work, the concept of fractal dimension was introduced and yard stick method was used to calculate fractal dimension of surface microtopography of ultra-precision machined oxygen-free copper. In order to reduce interference of tool marks signal and extrude information of embossed grain boundary, band-stop filter method was designed. The results showed that the surface fractal dimension and embossed grain boundary could be obtained on the surface after ultra-precision machining, but due to the similar size scale, the difference could not be distinguished by traditional roughness measurement. By coupling band-stop filtering and yard stick method, the feature of embossed grain boundary could be effectively identified, and which could reflect the microscopic, characteristic information of ultra-precision machined surface′s topography quantitatively.
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