| 艾星,陈果,何小珊,张玲,何智兵,杜凯.基于质谱诊断的C4H8/H2等离子体状态在放电腔室的径向分布研究[J].材料导报,2018,32(12):1943-1948, 1954 |
| 基于质谱诊断的C4H8/H2等离子体状态在放电腔室的径向分布研究 |
| Investigation of Radial Distribution of C4H8/H2 Plasmas in the Discharge Chamber Based on the Mass Spectrometer |
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| DOI：10.11896/j.issn.1005-023X.2018.12.001 |
| 中文关键词: 径向分布 C4H8/H2等离子体 工艺参数 辉光放电聚合物 |
| 英文关键词: radial distribution, C4H8/H2 plasmas, technological parameter, glow discharge polymer |
| 基金项目:国家自然科学基金(11504350) |
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| 摘要点击次数: 1657 |
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| 中文摘要: |
| 利用质谱研究了不同工艺参数下C4H8/H2等离子体的离子组分和能量的径向分布规律,并分析了CH片段的裂解与聚合过程。结果表明,当工作压强较低时(≤7 Pa),小分子CH片段的相对密度随径向距离的增大而逐渐减小,大分子CH片段则逐渐增多；随着工作压强的增大,CH片段的相对密度达到极值所对应的径向距离逐渐增大。当射频功率一定时,小分子CH片段的相对密度随径向距离增大而减小,大分子CH片段则逐渐增多。此外,离子能量随径向距离的增大均呈现出逐渐减小的趋势。当工作压强为3 Pa、射频功率为20 W时,C4H8/H2等离子体中CH片段的径向分布最均匀,有利于提高辉光放电聚合物薄膜结构与组分的均匀性。 |
| 英文摘要: |
| The plasmas of C4H8/H2 mixture gas at different technological parameters were studied using the energy-resolved mass spectrometer. The dissociation, ionization and polymerization during the deposition of glow discharge polymer (GDP) were analyzed. The results show that the relative intensities of small molecule CH fragment ions decrease with increasing radial distance at low work pressure (≤7 Pa), whereas the large CH molecule fragment ions are on the contrary. With the increasing working pressure, the radial distance increases when the relative intensities of CH fragment ions reached the maximum value. At the different radio frequency (RF) power, the relative intensities of small CH molecule fragment ions decrease with increasing radial distance, while the large CH molecule fragment ions increase. Besides, the ion energy decreases with the increase of radial distance at all technological parameters. The radial distribution of relative intensities of CH fragment ions is most uniform under the work pressure of 3 Pa and RF power of 20 W, which contribute to improve the homogeneity of structure and composition of glow discharge polymer film. |
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