摘要 简要介绍了金刚石薄膜的发展，总结了金刚石薄膜的几种主要制备工艺并对各种工艺的优、缺点进行了分析。结合对金刚石应用的讨论，阐述了金刚石薄膜在工业领域中的应用前景和发展趋势。
关键词 金刚石薄膜 化学气相沉积 制备与应用 Development, Synthesis and Application of Diamond Thin Films
WANG Lijun , DUAN Xinchao，ZHANG Lei，WANG Longyang, WANG Xiaoping
( College of Science, University of Shanghai for Science and Technology, Shanghai 200093)
Abstract The development of diamond thin films is introduced briefly in this paper. Several synthesis methods of diamond thin films are summarized. The merits and disadvantages of these methods are also particularly analyzed. The applied prospects and developmental trends of diamond thin films are expounded, combining the discussion of application in the industrial field.
Key words diamond thin films, chemical vapor deposition (CVD), synthesis and application