摘要 谐振腔是微波等离子灯的一个核心部件。详细分析了谐振腔(网罩)的模式及谐振腔材料的重要性,通过大量的实验对比层层深入地系统总结了目前微波等离子灯网罩的研发过程,给出理论解释的同时引出网罩最终发展方向。希望本篇文章能对微波等离子灯进一步研究具有参考意义。
关键词 微波 谐振腔 材料 Research and Analysis of Resonant Cavity of Microwave Plasma Lamp and Its Material
ZHUGE Tianxiang,YANG Zhonghai,HUANG Qixian
( School of Physical Electronics, Univ. of Elec. Sci. and Tech. of China, Chengdu 610054)
Abstract Resonant cavity (mesh cover) is one of the most important equipments in microwave plasma lamp.The mode of resonant cavity and its material are particularly analyzed in this article. The research process of mesh cover of microwave plasma lamp is summarized deeply by lots of experimental contrast. After the academic explanation for some phenomenon is given, the ways in which the mesh cover is improved well ultimately are pointed out.
Key words microwave, resonant cavity, material